直列静電レンズ型電離真空計における陰極位置 Effects of Cathode Position on Characteristics of a Cascade Static Lens Gauge

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著者

    • 田中 誠 TANAKA Makoto
    • 広島電機大学工学部電子工学科 Department of Electronics, Hiroshima-Denki Institute of Technology
    • 谷川 立 TANIGAWA Ryu
    • 広島電機大学工学部電子工学科 Department of Electronics, Hiroshima-Denki Institute of Technology
    • 金持 徹 KANAJI Toru
    • 広島電機大学工学部電子工学科 Department of Electronics, Hiroshima-Denki Institute of Technology
    • 三井 剛 MITSUI Tsuyoshi
    • 神戸大学工学部電気電子工学科 Department of Electrical & Electronics Engineering, Faculty of Engineering, Kobe University
    • 浦野 俊夫 URANO Toshio
    • 神戸大学工学部電気電子工学科 Department of Electrical & Electronics Engineering, Faculty of Engineering, Kobe University

抄録

The cascade static lens gauge (CSL gauge) has very high sensitivity and has been developed for the measurements of the total pressure in extremely high vacuum range. In this study, the effects of small shift of the filament position on the sensitivity were investigated, and it was clarified that the small shift affects on the sensitivity only a little. However, at the same time, it was found in the experiment that the potential of the filament (bias potential) with good sensitivity is not same with it predicted by computer simulation. Depending on these new knowledge and several new idea, a new electrode system of a CSL gauge which will have a very high sensitivity is proposed.

収録刊行物

  • 真空  

    真空 42(3), 195-199, 1999-03 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002476265
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    4714456
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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