直列静電レンズ型電離真空計における陰極位置 Effects of Cathode Position on Characteristics of a Cascade Static Lens Gauge
The cascade static lens gauge (CSL gauge) has very high sensitivity and has been developed for the measurements of the total pressure in extremely high vacuum range. In this study, the effects of small shift of the filament position on the sensitivity were investigated, and it was clarified that the small shift affects on the sensitivity only a little. However, at the same time, it was found in the experiment that the potential of the filament (bias potential) with good sensitivity is not same with it predicted by computer simulation. Depending on these new knowledge and several new idea, a new electrode system of a CSL gauge which will have a very high sensitivity is proposed.
真空 42(3), 195-199, 1999-03
The Vacuum Society of Japan