非ベーク真空系の圧力ビルドアップ特性 Outgassing Characteristics of an Unbaked Vacuum System by Pressure Rise Method
The outgassing rates of an unbaked vacuum chamber were measured by the orifice pumping and the pressre rise methods. It was found that the measured outgassing rates were dependent on pumping speed. The change of residual gas composition in the test chamber during measurement of outgassing rate was observed by a quadrupole mass analyzer. Before cut-off pumping, water vapor was a predominant desorbing gas, but after cut off pumping, hydrogen became a predominant desorbing gas instead of water.
真空 42(3), 204-207, 1999-03
The Vacuum Society of Japan