非ベーク真空系の圧力ビルドアップ特性

• 赤石 憲也

  核融合科学研究所

• 江崎 和弘

  核融合科学研究所

• 久保田 雄輔

  核融合科学研究所

• 本島 修

  核融合科学研究所

書誌事項

タイトル別名

• Outgassing Characteristics of an Unbaked Vacuum System by Pressure Rise Method.
• ヒベーク シンクウケイ ノ アツリョク ビルドアップ トクセイ

抄録

The outgassing rates of an unbaked vacuum chamber were measured by the orifice pumping and the pressre rise methods. It was found that the measured outgassing rates were dependent on pumping speed. The change of residual gas composition in the test chamber during measurement of outgassing rate was observed by a quadrupole mass analyzer. Before cut-off pumping, water vapor was a predominant desorbing gas, but after cut off pumping, hydrogen became a predominant desorbing gas instead of water.

収録刊行物

• 真空

  真空 42 (3), 204-207, 1999

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390001204063709312
• NII論文ID: 10002476277
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.42.204
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 4714524
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4714524
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可