非ベーク真空系の圧力ビルドアップ特性 Outgassing Characteristics of an Unbaked Vacuum System by Pressure Rise Method

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The outgassing rates of an unbaked vacuum chamber were measured by the orifice pumping and the pressre rise methods. It was found that the measured outgassing rates were dependent on pumping speed. The change of residual gas composition in the test chamber during measurement of outgassing rate was observed by a quadrupole mass analyzer. Before cut-off pumping, water vapor was a predominant desorbing gas, but after cut off pumping, hydrogen became a predominant desorbing gas instead of water.

収録刊行物

  • 真空  

    真空 42(3), 204-207, 1999-03 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002476277
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    4714524
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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