Textured ZnO-Based Transparent Conducting Films Prepared by Pulsed Laser Deposition. (II).

• SUZUKI Akio

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• YONEYAMA Yoshitaka

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• OKANISHI Shinobu

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• AOKI Takanori

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• MATSUSHITA Tatsuhiko

  Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University

• OKUDA Masahiro

  Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title

• パルスレーザー堆積法により作製した凹凸構造を有するＺｎＯ系透明導電膜　（ＩＩ）
• パルスレーザー タイセキホウ ニ ヨリ サクセイ シタ オウトツ コウゾウ オ ユウスル ZnOケイ トウメイ ドウデン マク 2

Abstract

About 800-nm-thick ZnO films doped with 4 wt% Ga₂O₃ (GZO films) have been deposited on glass and quartz substrates by a pulsed laser deposition method using Second-Harmonic-Generation (SHG) of Nd : YAG laser (λ =532 nm). In all experiments, a repetition rate of 10 Hz, energy densities of 0.12.5 J/cm², and irradiation times of 23 h were used. Scanning-Electron-Microscope (SEM) observations of the film surface revealed that there were micro-textured structures (0.51 μm in diameter) surrounded by small rugged and irregular structures (250400 nm in size). It was recognized from XRD spectra that a strong peak of (103) planes reflected from the micro-textured milky surfaces is dominant. A haze ratio of 46.6% was obtained at a wavelength of 550 nm for about 800-nm-thick GZO (4 wt%) films grown at substrate temperature of 300°C in oxygen with a flow rate of 3 sccm. The lowest resisitivity of 2.33 × 10^-4 Ω· cm and the lowest sheet resistance of 2.72 Ω/sq were obtained for these GZO (4 wt%) films.

Journal

• Shinku

  Shinku 42 (3), 329-332, 1999

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679042088704
• NII Article ID: 10002476542
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.42.329
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 4715429
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4715429
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed