新手法による誘導結合型プラズマのインピーダンス測定 Impedance Measurements for Inductive Coupled Plasmas with New Technique

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著者

    • 川田 博昭 KAWATA Hiroaki
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University
    • 本多 稔 HONDA Minoru
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University
    • 村田 顕二 MURATA Kenji
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

抄録

We developed a new measurement system for the antenna current to obtain a plasma impedance that was hardly measured due to the low inductance of the antenna coil. When a conventional measurement system was used, the phase angle between the voltage and current was 81° for a high density Ar plasma (10<SUP>11</SUP> cm<SUP>-3</SUP> plasma density at 6.7 Pa). With new cancel circuit that subtracts the current flow to the coil inductance, the current was down to ten times smaller and the phase angle decreased to 54°. Both the power dissipation and the plasma density measured by the Langmuir probe were almost direct proportional to the current. It was also demonstrated theoretically that the new system is useful for the measurement of the impedance and power dissipation in plasmas.

収録刊行物

  • 真空  

    真空 42(3), 337-340, 1999-03 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10002476559
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    4716308
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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