新手法による誘導結合型プラズマのインピーダンス測定

• 川田 博昭

  大阪府立大学工学部電子物理工学科

• 本多 稔

  大阪府立大学工学部電子物理工学科

• 松永 崇

  大阪府立大学工学部電子物理工学科

• 村田 顕二

  大阪府立大学工学部電子物理工学科

書誌事項

タイトル別名

• Impedance Measurements for Inductive Coupled Plasmas with New Technique.
• シン シュホウ ニ ヨル ユウドウ ケツゴウガタ プラズマ ノ インピーダンス ソクテイ

抄録

We developed a new measurement system for the antenna current to obtain a plasma impedance that was hardly measured due to the low inductance of the antenna coil. When a conventional measurement system was used, the phase angle between the voltage and current was 81° for a high density Ar plasma (10¹¹ cm^-3 plasma density at 6.7 Pa). With new cancel circuit that subtracts the current flow to the coil inductance, the current was down to ten times smaller and the phase angle decreased to 54°. Both the power dissipation and the plasma density measured by the Langmuir probe were almost direct proportional to the current. It was also demonstrated theoretically that the new system is useful for the measurement of the impedance and power dissipation in plasmas.

収録刊行物

• 真空

  真空 42 (3), 337-340, 1999

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390001204065382400
• NII論文ID: 10002476559
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.42.337
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 4716308
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4716308
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可