走査型水素検出顕微鏡の開発とその応用 Development of Scanning Protoscope and Its Application

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抄録

The electron-stimulated desorption (ESD) spectroscopy is very sensitive to hydrogen. We have developed a time-offlight type ESD (TOF-ESD) analyzer which enables us to detect hydrogen and oxygen ions desorbed from solid surfaces. A pencil type electron gun which provides a fine-focused electron beam has been combined with the TOF-ESD to analyze surface distribution of hydrogen on the surfaces. Firstly pulsed beam was used at 600 eV to analyze hydrogen distribution on Cu 600-meshes at the magnifications of 450 and 2000. Obtained images are clearly realized a grid meshes as same as scanning electron images by the lateral resolution of 1 μm. A previously lithographed pattern on the silicon surface covered with atomic hydrogen was also realized by the scanning analysis of hydrogen.

収録刊行物

  • 真空

    真空 42(3), 353-356, 1999-03

    The Vacuum Society of Japan

参考文献:  4件中 1-4件 を表示

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    被引用文献4件

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    ERES G.

    J. Vac. Sci. Technol. B15, 2934, 1997

    被引用文献1件

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    UEDA K.

    Mat. Res. Soc. Symp. Proc. 513, 17, 1998

    被引用文献1件

  • <no title>

    ISHIKAWA K.

    Rev.Sci.Instrum. 68, 4103, 1997

    DOI 被引用文献14件

各種コード

  • NII論文ID(NAID)
    10002476585
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    4716338
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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