走査型水素検出顕微鏡の開発とその応用 Development of Scanning Protoscope and Its Application
The electron-stimulated desorption (ESD) spectroscopy is very sensitive to hydrogen. We have developed a time-offlight type ESD (TOF-ESD) analyzer which enables us to detect hydrogen and oxygen ions desorbed from solid surfaces. A pencil type electron gun which provides a fine-focused electron beam has been combined with the TOF-ESD to analyze surface distribution of hydrogen on the surfaces. Firstly pulsed beam was used at 600 eV to analyze hydrogen distribution on Cu 600-meshes at the magnifications of 450 and 2000. Obtained images are clearly realized a grid meshes as same as scanning electron images by the lateral resolution of 1 μm. A previously lithographed pattern on the silicon surface covered with atomic hydrogen was also realized by the scanning analysis of hydrogen.
真空 42(3), 353-356, 1999-03
The Vacuum Society of Japan