単一溶液原料を用いた化学気相成長法によるMn添加(Ba, Sr)TiO_3薄膜の合成 [in Japanese] Preparation of Barium Strontium Titanate Thin Films by Liquid Source Chemical Vapor Deposition [in Japanese]
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Manganese-doped barium strontium titanate ((Ba, Sr) TiO<SUB>3</SUB>) thin films were prepared on platinum coated magnesium oxide single-crystal substrates at 650°C by single liquid source chemical vapor deposition. These thin films showed a dielectric constant of 200 and a dielectric loss of 2% at 100 mV and 1 kHz. The leakage current of (Ba, Sr) TiO<SUB>3</SUB> films were decreased about three order of magnitude by Mn doping.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 42(3), 368-371, 1999-03
The Vacuum Society of Japan