Nanometer-scale Observation of Layer-by-layer Oxidation of Si Surfaces

• ICHIKAWA Masakazu

  Joint Research Center for Atom Technology

Bibliographic Information

Other Title

• Si表面の原子層酸化のナノメータースケール観察

Journal

• 真空

  真空 42 (3), 420-, 1999-03

Details

• CRID: 1573105973902948736
• NII Article ID: 10002476720
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles