Surface Cleanness of Transported Substrate by the XHV Continuous Integrated Process with Levitation Transports System

• TOSA Masahiro

  National Research Institute for Metals

• KASAHARA Akira

  National Research Institute for Metals

• LEE Kyung Sub

  National Research Institute for Metals

• YOSHIHARA Kazuhiro

  National Research Institute for Metals

Bibliographic Information

Other Title

• 極高真空一貫プロセスにおける搬送試料の表面清浄性

Journal

• 真空

  真空 42 (3), 443-, 1999-03

Details

• CRID: 1571417124042684928
• NII Article ID: 10002476790
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles