Development of a Simulator for Cell-projection Type Electron Beam Lithography
-
- YAMAGUCHI Kiyoshi
- Department of Electronic Engineering, Osaka Institute of Technology
-
- KOTERA Masatoshi
- Department of Electronic Engineering, Osaka Institute of Technology
Bibliographic Information
- Other Title
-
- セルプロジェクション方式電子ビームリソグラフィのシミュレータ開発
Search this article
Journal
-
- 真空
-
真空 42 (3), 477-, 1999-03
- Tweet
Details 詳細情報について
-
- CRID
- 1571980073996088448
-
- NII Article ID
- 10002476886
-
- NII Book ID
- AN00119871
-
- ISSN
- 05598516
-
- Text Lang
- ja
-
- Data Source
-
- CiNii Articles