Studies on Photo-Chemical Reactions of SF_6 Molecule and Semiconductor Surfaces using Synchrotron Radiation
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- MOCHIJI Kozo
- Central Research Laboratory, Hitachi Ltd.
Bibliographic Information
- Other Title
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- 放射光を利用したSF_6分子および半導体表面の光化学反応に関する研究
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Journal
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- 放射光
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放射光 8 (1), 16-29, 1995-02-20
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Keywords
Details
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- CRID
- 1572824498930334336
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- NII Article ID
- 10002496637
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- NII Book ID
- AN10075706
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- ISSN
- 09149287
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- Text Lang
- ja
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- Data Source
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- CiNii Articles