Synchrotron Radiation Induced Selective CVD of A1 and the Reaction Control Mechanisms

• UESUGI Fumihiko

  NEC Corp., Analysis and Evaluation

• NISHIYAMA Iwao

  NEC Corp., Microelectronics Research Laboratories

Bibliographic Information

Other Title

• 放射光励起Al選択CVDとその反応制御機構

Journal

• 放射光

  放射光 8 (1), 60-68, 1995-02-20

Details

• CRID: 1570854174093360128
• NII Article ID: 10002496728
• NII Book ID: AN10075706
• ISSN: 09149287
• Text Lang: ja
• Data Source:
  • CiNii Articles