Possibility of Microfabrication by SR-Excited Etching

• TERAKADO Shingo

  SANYO Tsukuba Research Center

• SUZUKI Shigeo

  SANYO Tsukuba Research Center

Bibliographic Information

Other Title

• SR励起エッチングによる微細加工の可能性

Journal

• 放射光

  放射光 8 (1), 69-79, 1995-02-20

Keywords

• エッチング

Details

• CRID: 1573668923860466560
• NII Article ID: 10002496750
• NII Book ID: AN10075706
• ISSN: 09149287
• Text Lang: ja
• Data Source:
  • CiNii Articles