Reactive-Ion Etching of Fe, Co-Cr Alloys or Ni-Fe Alloys

• NAKATANI Isao

  National Research Institute for Metals

Bibliographic Information

Other Title

• 磁性材料Fe, Co-Cr合金, 及びNi-Fe合金の反応性イオンエッチング

Journal

• 日本応用磁気学会研究会資料

  日本応用磁気学会研究会資料 103 87-94, 1998-01-29

Details

• CRID: 1571135649068203136
• NII Article ID: 10002521306
• NII Book ID: AN00351217
• ISSN: 13407562
• Text Lang: ja
• Data Source:
  • CiNii Articles