In this paper, we report about recent development of LIGA process in microfabrication technologies and magnetic micromachines obtained by this process

• ARAI K. i.

  Res. Inst. Elect. Commu., Tohoku Univ.

• YAMAGUCHI M.

  Res. Inst. Elect. Commu., Tohoku Univ.

Bibliographic Information

Other Title

• LIGAプロセスと磁気マイクロマシン

Journal

• 日本応用磁気学会研究会資料

  日本応用磁気学会研究会資料 106 49-54, 1998-07-16

Details

• CRID: 1574231873812194432
• NII Article ID: 10002521575
• NII Book ID: AN00351217
• ISSN: 13407562
• Text Lang: ja
• Data Source:
  • CiNii Articles