Deposition of Ta_2O_5 Thin Films by Off-axis Laser Ablation Method(II)

• OZAKI Tatsuya

  National Defence Academy

• INOUE Narumi

  National Defence Academy

• KASHIWABARA Shigeru

  National Defence Academy

• TOSHIMA Shigetada

  National Defence Academy

• FUJIMOTO Ryozo

  Nippon Bunri Univ.

Bibliographic Information

Other Title

• オフ・アクシスレーザーアブレーション法によるTa_2O_5薄膜の堆積(II)

Journal

• レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers

  レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 16 151-, 1996-01-01

Details

• CRID: 1570291224138167040
• NII Article ID: 10002526336
• NII Book ID: AA11604265
• ISSN: 09136355
• Text Lang: ja
• Data Source:
  • CiNii Articles