Irradiation Effects with Eximer Laser and YAG Laser for Si_3N_4 Film and Ceramics
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- TAKIGAWA Y.
- OECU
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- YAMANAKA T.
- Osaka Univ. ILE
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- NAKAMAE K.
- Univ. Osaka Pref.
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- KUROSAWA K.
- Miyazaki Univ.
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- SASAKI W.
- Miyazaki Univ.
Bibliographic Information
- Other Title
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- Si_3N_4膜とセラミクスに対するエキシマレーザーとYAGレーザーの照射効果
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Journal
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- レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers
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レーザー学会学術講演会年次大会講演予稿集 = Annual meeting, of the Laser Society of Japan digest of technical papers 16 186-, 1996-01-01
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Details 詳細情報について
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- CRID
- 1571698599021719040
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- NII Article ID
- 10002526398
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- NII Book ID
- AA11604265
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- ISSN
- 09136355
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- Text Lang
- ja
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- Data Source
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- CiNii Articles