ホットクラスターエピタキシーによる高温超伝導体YBa<SUB>2</SUB>Cu<SUB>3</SUB>O<SUB>7−<I>x</I></SUB>厚膜作製
書誌事項
- タイトル別名
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- Deposition of High-Critical-Temperature Superconductor YBa<SUB>2</SUB>Cu<SUB>3</SUB>O<SUB>7−<I>x</I></SUB> Epitaxial Thick Film by Hot Cluster Epitaxy
- ホットクラスターエピタキシーによる高温超伝導体YBa2Cu3O7-x厚膜作製
- ホットクラスターエピタキシー ニ ヨル コウオン チョウデンドウタイ YBa2Cu3O7-x アツマク サクセイ
- Deposition of High-Critical-Temperature Superconductor YBa<SUB>2</SUB>Cu<SUB>3</SUB>O<SUB>7−<I>x</I></SUB> Epitaxial Thick Film by Hot Cluster Epitaxy
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Hot cluster epitaxy (HCE) is a novel high-rate epitaxial growth mechanism discovered in the study of the plasma flash evaporation method. In HCE, the main deposition species are thermally activated, nanometer-scale clusters (hot clusters), which have unique characteristics such as high internal energy and high sticking probability even at high substrate temperature. Actually, with HCE, deposition of YBa2Cu3O7−x epitaxial films at a growth rate of 16 nm/s on the SrTiO3 substrate has been achieved. However, films thicker than 2 μm could not be obtained so far. In this paper, we discuss the “charge-up” effect of clusters and insulating substrates in a plasma environment as a retarding factor for film growth. Probe measurements and the biasing deposition clarified the charge-up of clusters were charged up during deposition. It was found that more than 60% of the clusters were negatively charged. By using conductive substrates of Nb doped SrTiO3, or changing Ar composition in Ar-O2 plasma, we could deposit monolayer-smooth epitaxial YBa2Cu3O7−x films thicker than 3 μm, with excellent properties; the full width less than 0.14° at half maximum of the X-ray rocking curve of the (005) peak, and the superconducting transition temperature of 92 K. These results suggest the future role of HCE in epitaxial thick film deposition.
収録刊行物
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- 日本金属学会誌
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日本金属学会誌 63 (1), 68-73, 1999
公益社団法人 日本金属学会
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詳細情報
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- CRID
- 1390001206491026432
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- NII論文ID
- 130007341623
- 10002548551
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- NII書誌ID
- AN00187860
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- ISSN
- 18806880
- 24337501
- 00214876
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- NDL書誌ID
- 4636898
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