Hysteresis Curve Variations of MOS Capacitors Passivated by Ba(PO_3)_2-Al(PO_3)_3-B_2O_3 Glasses [in Japanese]
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The purpose of this work is to clarify the relationship between some of the properties of MOS (metal, oxide, silicon) capacitors passivated by Ba(PO<SUB>3</SUB>)<SUB>2</SUB>-Al(PO<SUB>3</SUB>)<SUB>3</SUB>-B<SUB>2</SUB>O<SUB>3</SUB> glasses and the hydroxyl contents of the glasses. When substitution of Al(PO<SUB>3</SUB>)<SUB>3</SUB> for Ba(PO<SUB>3</SUB>)<SUB>2</SUB> progressively decreased the OH<SUP>−</SUP> absorption intensity, the C-V (capacitance-voltage) curve shift, ΔV<SUB>G</SUB> in the MOS capacitors decreased.
- Chemistry Letters
Chemistry Letters 1996(8), 585-586, 1996-08
The Chemical Society of Japan