The ESR Investigation of Brownish Ring at the Surface of Quartz Crucible Used for Cz-Si Crystal Growth

• WATANABE Kohji

  Nippon Steel Corporation, Advanced Technology Research Laboratories

• TANAKA Koki

  Nippon Steel Corporation, Advanced Technology Research Laboratories

• HASEBE Masami

  Nippon Steel Corporation, Advanced Technology Research Laboratories

収録刊行物

• Chemistry letters

  Chemistry letters 1996 (8), 627-628, 1996-08

詳細情報

• CRID: 1571417124034051968
• NII論文ID: 10002605020
• NII書誌ID: AA00603318
• ISSN: 03667022
• 本文言語コード: ja
• データソース種別:
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