A Negative-Working Alkaline Developable Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator

この論文をさがす

著者

    • NAKAYAMA Tomonari
    • Department of Human Sensing and Functional Sensor Engineering. Graduate School of Engineering, Yamagata University
    • HAGA Kohji
    • Department of Human Sensing and Functional Sensor Engineering. Graduate School of Engineering, Yamagata University
    • HABA Osamu
    • Department of Human Sensing and Functional Sensor Engineering. Graduate School of Engineering, Yamagata University
    • UEDA Mitsuru
    • Department of Human Sensing and Functional Sensor Engineering. Graduate School of Engineering, Yamagata University

収録刊行物

  • Chemistry letters

    Chemistry letters 1997(3), 265-266, 1997-03

参考文献:  7件中 1-7件 を表示

  • <no title>

    WILLSON C. G.

    Introduction to Microlithography 139, 1994

    被引用文献4件

  • <no title>

    ALLEN R. D.

    Proc. SPIE 2438, 250, 1995

    被引用文献2件

  • <no title>

    GUTSCHE C. D.

    Aldrichimica Acta 28, 3, 1995

    被引用文献3件

  • <no title>

    FUJITA J.

    Appl. Phys. Lett. 68, 2438, 250, 1995

    被引用文献1件

  • <no title>

    WEINER F.

    J. Org. Chem. 56, 5527, 1991

    被引用文献1件

  • <no title>

    UEDA M.

    Macromolecules 29, 6427, 1996

    被引用文献5件

  • <no title>

    HOGBERG A. G. S.

    J. Org. Sci. 45, 4498, 1980

    被引用文献1件

被引用文献:  1件中 1-1件 を表示

各種コード

  • NII論文ID(NAID)
    10002610500
  • NII書誌ID(NCID)
    AA00603318
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03667022
  • データ提供元
    CJP書誌  CJP引用 
ページトップへ