Sputter-deposition condition and acid etching mode in Co-Cr films

• HARADA K.

  AIT Akita Research Institute of Advanced Technology

• HONDA N.

  AIT Akita Research Institute of Advanced Technology

• OUCHI K.

  AIT Akita Research Institute of Advanced Technology

Bibliographic Information

Other Title

• CoCrスパッタ膜の作製法と酸エッチングモード

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 19 9-, 1995-09-01

Details

• CRID: 1574231873810299264
• NII Article ID: 10002645913
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles