Characteristic of MR Permalloy film by long throw sputtering method

  • IKEDA S.
    Institute for Super Materials, ULVAC JAPAN Ltd.
  • KOMATSU T.
    Institute for Super Materials, ULVAC JAPAN Ltd.
  • NAKAMURA K.
    Institute for Super Materials, ULVAC JAPAN Ltd.

Bibliographic Information

Other Title
  • ロングスロースパッタ法により作製したパーマロイ膜のMR特性

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Details 詳細情報について

  • CRID
    1573105973903712000
  • NII Article ID
    10002646499
  • NII Book ID
    AN10269644
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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