Preparation of a film containing foreign fine particles by gas-flow-sputtering

Bibliographic Information

Other Title
  • ガスフロースパッタ法による超微粒子分散膜の作製

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Details 詳細情報について

  • CRID
    1570291224136374144
  • NII Article ID
    10002646776
  • NII Book ID
    AN10269644
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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