Magnetic Field and Plasma Distribution in the PE Sputtering Target

• NAGASAKA K.

  Research Institute of Electrical Communication, Tohoku Univ.

• WATANABE I.

  Research Institute of Electrical Communication, Tohoku Univ.

• MURAOKA H.

  Research Institute of Electrical Communication, Tohoku Univ.

• NAKAMURA Y.

  Research Institute of Electrical Communication, Tohoku Univ.

Bibliographic Information

Other Title

• 円筒型PEターゲットの磁界分布とプラズマ分布

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 19 401-, 1995-09-01

Details

• CRID: 1573950398833749120
• NII Article ID: 10002646969
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles