Permalloy thin film by ECR ion beam sputtering
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- HOSHINO Akira
- ULVAC
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- TAKAGI Ken'ichi
- ULVAC
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- OHASHI Ryoko
- Keio Univ.
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- SHIIKI Kazuo
- Keio Univ.
Bibliographic Information
- Other Title
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- ECR・IBS法によるパーマロイ薄膜の作製
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Journal
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- 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan
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日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 19 506-, 1995-09-01
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Details 詳細情報について
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- CRID
- 1573668923856912256
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- NII Article ID
- 10002647232
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- NII Book ID
- AN10269644
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- Text Lang
- ja
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- Data Source
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- CiNii Articles