Substrate heating effect on film stress of Fe-Ta-N films
Bibliographic Information
- Other Title
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- Fe-Ta-N膜の膜応力に及ぼす基板加熱効果
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Journal
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- 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan
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日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 19 508-, 1995-09-01
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Details 詳細情報について
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- CRID
- 1571417124043225600
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- NII Article ID
- 10002647237
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- NII Book ID
- AN10269644
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- Text Lang
- ja
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- Data Source
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- CiNii Articles