アルミニウム陽極酸化皮膜への電析金属の二次イオン質量分析 Secondary ion mass spectrometry of the electrodeposition metals in anodizing films of aluminum
Standard sample is necessary for determination on surface analysis, and particularly it is difficult to make a standard sample for secondary ion mass spectrometry (SIMS). A sample turned ion implantation into is used for a standard sample of quantitative analysis with SIMS, but it is neither simple nor easy to make a standard sample for the analysis of various kinds of samples. The first electrolysis was done with sulfate (H<sub>2</sub>SO<sub>4</sub>) bath and trisodium phosphate (Na<sub>3</sub>PO<sub>4</sub>) bath, and second electrolysis of tin and nickel was done on the films. The trace metals (Sn and Ni) deposited by second electrolysis was determined by graphite furnace atomic absorption spectrometry (GFAAS), and it was investigated to make the standard sample for the analysis of electrolytic pigmentation coatings on SIMS. The relative sensitivity factor (RSF) was calculated from the film density measured with GFAAS. RSF of <sup>120</sup>Sn was 4.63 × 10<sup>14</sup> in coating formed with H<sub>2</sub>SO<sub>4</sub> bath, and RSF of <sup>120</sup>Sn was 3.142 × 10<sup>14</sup> in coating formed with Na<sub>3</sub>PO<sub>4</sub> bath. As the result of the depth profiles by SIMS, the deposition behavior of the metal was different by the kind of first electrolysis baths; the metal deposited along pore wall in H<sub>2</sub>SO<sub>4</sub> bath coating, and the metal accumulated in pore bottom in Na<sub>3</sub>PO<sub>4</sub> bath coating. The distribution of concentration and the deposition behavior of metal was elucidated with SIMS.
軽金属 48(8), 390-394, 1998-08
The Japan Institute of Light Metals