Heat Transfer and Thermal Diffusion Phenomena in a Horizontal Cold-Wall CVD Reactor.

• Tanoue Ken-ichirou

  Inst. of Advanced Material Study, Kyushu Univ. Interdisciplinary Graduate School of Eng. Sci., Kyushu University

• Sato Tsuneyuki

  Inst. of Advanced Material Study, Kyushu Univ.

• Imaishi Nobuyuki

  Inst. of Advanced Material Study, Kyushu Univ.

Bibliographic Information

Other Title

• 水平コールドウォール型ＣＶＤ装置の熱流動特性および熱拡散現象
• スイヘイ コールドウォールガタ CVD ソウチ ノ ネツ リュウドウ トクセイ

Abstract

Heat transfer, fluid flow and thermal diffusion phenomena in a horizontal cold-wall CVD reactor were investigated theoretically and experimentally. The flow visualization experiments revealed that a stable two dimensional flow pattern prevails in the He system over a wide range of Reynolds numbers, while the N₂ system has a tendency to form a complex three dimensional flow structure in which transversal and longitudinal rolls were included. The calculated results of a two dimensional numerical model accurated represent the experimentally observed flow for the He system. Thermal diffusion phenomena in a cold-wall CVD reactor were elucidated successively by measuring the composition of SF₆ as a simulated CVD source material. Through experiments, it was found that a compositional separation about 3 times larger was likely to be achieved in the He system, which has a larger value of ratio in molecular weight compared to the N₂ system. Numerical results calculated using a thermal diffusion factor estimated from inlet gas composition agreed well with experimental results. Fluid flow and concentration profiles were changed dramatically under the various gravitational accelerations conditions.

Journal

• KAGAKU KOGAKU RONBUNSHU

  KAGAKU KOGAKU RONBUNSHU 22 (1), 140-149, 1996

  The Society of Chemical Engineers, Japan

Keywords

• CVD
• Heat Transfer
• Fluid Flow
• Thermal diffusion
• Cold-Wall Reactor

Details

• CRID: 1390001204508913408
• NII Article ID: 10002668100
• NII Book ID: AN00037234
• DOI: 10.1252/kakoronbunshu.22.140
• COI: 1:CAS:528:DyaK28XnvVKmtw%3D%3D
• ISSN: 13499203
• ISSN: 0386216X
• ISSN: http://id.crossref.org/issn/0386216X
• NDL BIB ID: 3918376
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I3918376
• Web Site: http://www.jstage.jst.go.jp/article/kakoronbunshu1975/22/1/22_1_140/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed