ポリエチレンのエキシマレーザーアブレーションの可視化観察 Visualization of Excimer Laser Ablation of Polyethylene
Excimer laser ablation of high-density polyethylene (HDPE) has been visualized by using a high-speed camera. Although the excimer laser ablation is applied for polymer micro fabrication processes, its mechanism is not well understood. High speed visualization of the ablation process is crucial for the process improvement and modeling. In the experiment, a high-speed camera (40500 frames/sec) has been used to visualize the HDPE plume advancing from the sample surface. At first, the ablation depth of the HDPE is compared at different pressure. The depth increases with decreasing pressure. The ablation state is observed to change by increasing the laser fluence. At lower fluences, plume can be seen, however, flame appears at higher fluences. Initial velocity of the plume can be obtained from the visualized images. These data will help the development of a numerical model that incorporates the effect of ablated material on the incident laser pulse.
- 可視化情報学会誌 = Journal of the Visualization Society of Japan
可視化情報学会誌 = Journal of the Visualization Society of Japan 17, 233-234, 1997-10-01
The Visualization Society of Japan