Aerosol Technology for Contamination Control in Micro-Electronics

• SAKATA Soichiro

  Manager, Research & Development Center, Takasago Thermal Engineering Co., Ltd.

Bibliographic Information

Other Title

• 特集にあたって

Journal

• Earozoru Kenkyu

  Earozoru Kenkyu 11 (1), 4-4, 1996

  Japan Association of Aerosol Science and Technology

Details

• CRID: 1390001204343238272
• NII Article ID: 10002686848
• NII Book ID: AN10041511
• DOI: 10.11203/jar.11.4
• ISSN: 1881543X
• ISSN: 09122834
• Data Source:
  • JaLC
  • CiNii Articles