Measurement of Generated Particles in Semiconductor Manufacturing Apparatus

• KONDO Kaoru

  Assistant Manager, RION Co., Ltd. Environmental Engineering Department

Bibliographic Information

Other Title

• 半導体製造装置内生成粒子の測定

Journal

• Earozoru Kenkyu

  Earozoru Kenkyu 11 (1), 16-21, 1996

  Japan Association of Aerosol Science and Technology

Keywords

• Particle
• Particle Counter
• Particle Generation
• Semiconductor
• TFT
• CVD

Details

• CRID: 1390282679318783104
• NII Article ID: 10002686870
• NII Book ID: AN10041511
• DOI: 10.11203/jar.11.16
• COI: 1:CAS:528:DyaK28XivVOruro%3D
• ISSN: 1881543X
• ISSN: 09122834
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles