Particle Contamination and Chemical Contamination

• SAIKI Atsushi

  Deputy Senior Chief Engineer, Hitachi Plant Engineering and Construction Co., Ltd.

Bibliographic Information

Other Title

• 塵埃汚染と化学汚染

Journal

• Earozoru Kenkyu

  Earozoru Kenkyu 11 (1), 22-25, 1996

  Japan Association of Aerosol Science and Technology

Keywords

• Particle Contamination
• Chemical Contamination
• LSI Manufacturing
• Cleanroom
• Clean Class
• LSI Yield
• Concentration in ng/1

Details

• CRID: 1390282679317723520
• NII Article ID: 10002686881
• NII Book ID: AN10041511
• DOI: 10.11203/jar.11.22
• ISSN: 1881543X
• ISSN: 09122834
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles
  • Crossref