A Molecular Contamination Control on Clean Room and its Risk Benefit

• YASUOKA Shuichi

  Japan Air Cleaning Association

Bibliographic Information

Other Title

• クリーンルームの分子汚染制御とリスク・ベネフィット

Journal

• エアロゾル研究 = Journal of aerosol research

  エアロゾル研究 = Journal of aerosol research 12 (4), 327-328, 1997-12-20

Keywords

• Clean Room
• Molecular Contamination
• Risk-Benefit

Details

• CRID: 1570291224128313216
• NII Article ID: 10002687847
• NII Book ID: AN10041511
• ISSN: 09122834
• Text Lang: ja
• Data Source:
  • CiNii Articles