Three dimensional atom probe analysis of Co-12cr-2Ta sputtered thin films
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- HONO K.
- National Research Institute for Metals
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- NISHIMAKI J.
- Institute for Materials Research, Tohoku Univeristy
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- HASEGAWA N.
- Central Laboratory, ALPS Electric Co. , Ltd.
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- SAKURAI T.
- Institute for Materials Research, Tohoku Univeristy
Bibliographic Information
- Other Title
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- Co-12Cr-2Ta薄膜の3次元アトムプローブ分析
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Journal
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- 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan
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日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 20 193-, 1996-09-01
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Details 詳細情報について
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- CRID
- 1570009749165697664
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- NII Article ID
- 10002729197
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- NII Book ID
- AN10269644
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- Text Lang
- ja
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- Data Source
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- CiNii Articles