Improvement of the stiction of an HDD slider by SiOx : H thin film overcoat

Bibliographic Information

Other Title
  • SiOx : H薄膜によるHDDスライダーの吸着力低減

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Journal

Details 詳細情報について

  • CRID
    1573950398839593088
  • NII Article ID
    10002729250
  • NII Book ID
    AN10269644
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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