Effect of back ground pressure for sputtering of Co-Cr film

• NAKASHIO Eiji

  Res. Inst. of Elec. Comm. , Tohoku Univ.

• SAKAGUCHI Takeshi

  Res. Inst. of Elec. Comm. , Tohoku Univ.

• WATANABE Isao

  Res. Inst. of Elec. Comm. , Tohoku Univ.

• MURAOKA Hiroaki

  Res. Inst. of Elec. Comm. , Tohoku Univ.

• NAKAMURA Yoshihisa

  Res. Inst. of Elec. Comm. , Tohoku Univ.

Bibliographic Information

Other Title

• Co-Cr垂直膜成膜時の背圧改善効果

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 20 225-, 1996-09-01

Details

• CRID: 1574231873816306688
• NII Article ID: 10002729272
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles