Growth characteristics of Co films in gas-flow-sputtering process

• ISHII K.

  Utsunomiya Univ.

• KAWAZU M.

  Utsunomiya Univ.

• MINAMIDA H.

  Utsunomiya Univ.

Bibliographic Information

Other Title

• ガスフロースパッタ法によるCo膜成長の基礎特性

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 20 291-, 1996-09-01

Details

• CRID: 1571417124049230592
• NII Article ID: 10002729458
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles