Analysis by EPMA for iron nitride thin films prepared by the magnetron discharge method

• TADA M.

  College of Industrial Technology, Nihon Univ.

• UKAI K.

  College of Industrial Technology, Nihon Univ.

• NIIZUMA K.

  College of Industrial Technology, Nihon Univ.

• UTSUSHIKAWA Y.

  College of Industrial Technology, Nihon Univ.

Bibliographic Information

Other Title

• マグネトロン放電による窒化鉄薄膜のEPMAによる解析

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 20 299-, 1996-09-01

Details

• CRID: 1573387448886208000
• NII Article ID: 10002729481
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles