Layered structure analysis of multilayers by use of X-ray reflectometory and X-ray fluorescence analysis

• HARA Y.

  Fujitsu Laboratories Ltd.

• KITADE Y.

  Fujitsu Laboratories Ltd.

• SHIMIZU Y.

  Fujitsu Ltd.

• UZUMAKI T.

  Fujitsu Laboratories Ltd.

• OSHIKI M.

  Fujitsu Laboratories Ltd.

Bibliographic Information

Other Title

• X線反射率と蛍光X線測定による金属多層膜構造解析

Journal

• 日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan

  日本応用磁気学会学術講演概要集 = Digest of ... annual conference on magnetics in Japan 21 432-, 1997-10-01

Details

• CRID: 1570572699118350336
• NII Article ID: 10002730949
• NII Book ID: AN10269644
• Text Lang: ja
• Data Source:
  • CiNii Articles