Velocity distribution of leaky surface acoustic waves in silicon single crystal by line-focus-beam acoustic microscopy

• KUSHIBIKI J.

  Faculty of Engineering, Tohoku University

• AKASHI N.

  Faculty of Engineering, Tohoku University

• MATSUMURA T.

  Faculty of Engineering, Tohoku University

Bibliographic Information

Other Title

• 直線集束ビーム超音波顕微鏡によるシリコン単結晶の漏洩弾性表面波速度分布

Journal

• 日本音響学会研究発表会講演論文集

  日本音響学会研究発表会講演論文集 1995 (1), 953-954, 1995-03-01

Details

• CRID: 1570291224141604736
• NII Article ID: 10002733920
• NII Book ID: AN00351181
• ISSN: 13403168
• Text Lang: ja
• Data Source:
  • CiNii Articles