Growth and microstructural characterization of AnO films on(0001)Al_2O_3 substrate by ECR-assisted MBE

• KANG H. -B.

  Graduate School of Engineering, Tohoku University

• NAKAMURA K.

  Graduate School of Engineering, Tohoku University

• LIM S. -H.

  Institute for Advanced Materials Processing, Tohoku University

• SHINDO D.

  Institute for Advanced Materials Processing, Tohoku University

Bibliographic Information

Other Title

• ECR-MBE法によるZnO圧電膜の成長とその特性

Journal

• 日本音響学会研究発表会講演論文集

  日本音響学会研究発表会講演論文集 1998 (2), 1201-1202, 1998-09-01

Details

• CRID: 1571135649067958784
• NII Article ID: 10002749380
• NII Book ID: AN00351181
• ISSN: 13403168
• Text Lang: ja
• Data Source:
  • CiNii Articles