Control of oriented thin film by linear rapid thermal annealing

• TSUCHIYA Naoto

  Yamanashi University

• NAKAGAWA Yasuhiko

  Yamanashi University

Bibliographic Information

Other Title

• リニア型高速熱処理法による薄膜配向性の制御

Journal

• 日本音響学会研究発表会講演論文集

  日本音響学会研究発表会講演論文集 1998 (2), 1203-1204, 1998-09-01

Details

• CRID: 1574231873811773952
• NII Article ID: 10002749388
• NII Book ID: AN00351181
• ISSN: 13403168
• Text Lang: ja
• Data Source:
  • CiNii Articles