Epitaxial Growth of ZnO thin films on rotated Y-cut LiTaO_3 by ECR-assisted MBE technique

• NAKAMURA K.

  Graduate School of Engineering, Tohoku University

• SHOJI T.

  Graduate School of Engineering, Tohoku University

• KANG H. -B.

  Graduate School of Engineering, Tohoku University

Bibliographic Information

Other Title

• ECR-MBE法によるLiTaO_3回転Yカット基板上へのZnO圧電膜の成長

Journal

• 日本音響学会研究発表会講演論文集

  日本音響学会研究発表会講演論文集 1999 (1), 837-838, 1999-03-01

Details

• CRID: 1570572699100921216
• NII Article ID: 10002751476
• NII Book ID: AN00351181
• ISSN: 13403168
• Text Lang: ja
• Data Source:
  • CiNii Articles