Simultaneous Removal of Gaseous and Particulate Contaminants in Cleanroom

• FUJII Toshiaki

  Ebara Research Co. Ltd.

• SUZUKI Tsukuru

  Ebara Research Co. Ltd.

• SAKAMOTO Kazuhiko

  Saitama Univ.

Bibliographic Information

Other Title

• クリーンルームにおけるガスと粒子の同時除去

Journal

• エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology

  エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology 14 157-159, 1997-08

Details

• CRID: 1572261548971320064
• NII Article ID: 10002782517
• NII Book ID: AA11498601
• Text Lang: ja
• Data Source:
  • CiNii Articles