Evaluation of Outgassing Compounds from Cleanroom Construction Materials

• TAKEDA Kikuo

  Sumika Chemical Analysis Service, Ltd

• NONAKA Tatsuo

  Sumika Chemical Analysis Service, Ltd

• MATSUMOTO Ikuko

  Sumika Chemical Analysis Service, Ltd

• FUJIMOTO Taketoshi

  Sumika Chemical Analysis Service, Ltd

Journal

• エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology

  エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology 16 1-3, 1999-07-01

Details

• CRID: 1570009749157687168
• NII Article ID: 10002782658
• NII Book ID: AA11498601
• Text Lang: en
• Data Source:
  • CiNii Articles