Particle conversion and capture of gaseous contaminants in cleanroom

• SEKIGUCHI Kazuhiko

  Graduate School of Science and Engineering, Saitama University

• SAKAMOTO Kazuhiko

  Graduate School of Science and Engineering, Saitama University

• ISHITANI Osamu

  Graduate School of Science and Engineering, Saitama University

• FUJII Toshiaki

  Ebara Research Co., Ltd.

Bibliographic Information

Other Title

• クリームルーム内ガス状汚染物質の粒子化除去

Journal

• エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology

  エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology 16 7-9, 1999-07-01

Details

• CRID: 1571980073994662272
• NII Article ID: 10002782661
• NII Book ID: AA11498601
• Text Lang: ja
• Data Source:
  • CiNii Articles