Ultra Fine Particle Formation by Chemical Vapor Deposition Method -Application of A New Nucleation Model to Particle Formation in Gaseous Phase-

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Other Title
  • 気相反応法による超微粒子の生成 -核生成の新しい工学モデルによる検討-

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Details 詳細情報について

  • CRID
    1571698599017953920
  • NII Article ID
    10002782675
  • NII Book ID
    AA11498601
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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