Evaluation of cleanroom air and outgas from actual construction materials

• ITO Takao

  DAI-DAN Co., LTD.

• YOSHIDA Kazuya

  DAI-DAN Co., LTD.

• NONAKA Tatsuo

  Sumika Chemical Analysis Service, Ltd.

• TAKEDA Kikuo

  Sumika Chemical Analysis Service, Ltd.

• FUJIMOTO Taketoshi

  Sumika Chemical Analysis Service, Ltd.

Bibliographic Information

Other Title

• 稼動クリーンルーム構成材からの揮発性有機化合物の評価と雰囲気汚染の影響

Journal

• エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology

  エアロゾル科学・技術研究討論会 = Symposium on Aerosol Science & Technology 16 60-62, 1999-07-01

Details

• CRID: 1571980073994707584
• NII Article ID: 10002782728
• NII Book ID: AA11498601
• Text Lang: ja
• Data Source:
  • CiNii Articles