パルスエアジェット洗浄法の表面洗浄特性 Characteristics of Surface Cleaning by Consecutive Pulse-Air-Jets

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著者

    • 並木 則和 NAMIKI Norikazu
    • 金沢大学工学部物質化学工学科 Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University
    • 大谷 吉生 OTANI Yoshio
    • 金沢大学工学部物質化学工学科 Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University
    • 江見 準 EMI Hitoshi
    • 金沢大学工学部物質化学工学科 Department of Chemistry and Chemical Engineering, Faculty of Engineering, Kanazawa University

抄録

Pulse-air-jet blow is effective for the removal of fine particles from surfaces. In the present work, the removal characteristics of PSL particles from a wafer surface were investigated by measuring the distribution of removal efficiency on wafer surface. The influence of slit width of rectangular air-jet nozzle and the impinging angle of air-jet on the distribution of removal efficiency were experimentally studied. As a result, it was found that the relationship between a cleaned area with a removal efficiency greater than a given removal efficiency and the removal efficiency is expressed by a Rosin-Rammler distribution, and the shape of the distribution is invariant with the number of pulse-air-jet blows although the cleaned area increases with the number of blows. Further, experimental results showed that there exists optimal values in the slit width of air-jet nozzle and the impinging angle of air-jet for cleaning a wider area with a higher removal efficiency.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research  

    エアロゾル研究 = Journal of aerosol research 13(2), 127-132, 1998-06-20 

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10002783009
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09122834
  • NDL 記事登録ID
    4512512
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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